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Journal description
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Details for article 39 of 60 found articles
| Title: |
Multipurpose 14.5GHz ECR ion source: Special features and application for surface modification |
| Author: |
Kökényesi, S. Iván, I. Takács, E. Pálinkás, J. Biri, S. Valek, A. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 233 (2005) nr. 1-4 pages 5 p. |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 39 of 60 found articles
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