High frequency electromagnetic field processing of amorphous silicon layers containing nanoclusters produced by implantation of metal ions in Si(100) matrix
Titel:
High frequency electromagnetic field processing of amorphous silicon layers containing nanoclusters produced by implantation of metal ions in Si(100) matrix
Auteur:
Kalitzova, Maria Gesheva, Kostadinka Vlakhov, Emil Marinov, Yordan Gogova, Daniela Ivanova, Tatyana Angelov, Christo Pashov, Nikolai Zollo, Giuseppe Vitali, Gianfranco
Verschenen in:
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms