|
Kinoform X-ray lens creation in polymer materials by deep X-ray lithography |
|
|
|
Titel: |
Kinoform X-ray lens creation in polymer materials by deep X-ray lithography |
Auteur: |
Nazmov, V Shabel'nikov, L Pantenburg, F.-J Mohr, J Reznikova, E Snigirev, A Snigireva, I Kouznetsov, S DiMichiel, M |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 217 (2004) nr. 3 pagina's 8 p. |
Jaar: |
2004 |
Inhoud: |
|
Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|