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Compositional analysis of thin SiO x N y :H films by heavy-ion ERDA, standard RBS, EDX and AES: a comparison |
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Titel: |
Compositional analysis of thin SiO x N y :H films by heavy-ion ERDA, standard RBS, EDX and AES: a comparison |
Auteur: |
Bohne, W Röhrich, J Schöpke, A Selle, B Sieber, I Fuhs, W del Prado, Á San Andrés, E Mártil, I González-Dı́az, G |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 217 (2004) nr. 2 pagina's 9 p. |
Jaar: |
2004 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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