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Journal description
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Details for article 22 of 22 found articles
| Title: |
Treatment homogeneity and conformal analysis of plasma based ion implanted 3D target |
| Author: |
Sun, Qi Gu, Changxin Ma, Xinxin Xia, Lifang |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 217 (2004) nr. 2 pages 7 p. |
| Year: |
2004 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 22 of 22 found articles
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