Self-interstitial diffusion and clustering with impurities in crystalline silicon
Titel:
Self-interstitial diffusion and clustering with impurities in crystalline silicon
Auteur:
Mirabella, S. De Salvador, D. Napolitani, E. Giannazzo, F. Impellizzeri, G. Bisognin, G. Terrasi, A. Raineri, V. Berti, M. Carnera, A. Drigo, A.V. Priolo, F.
Verschenen in:
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms