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                                       Details for article 13 of 70 found articles
 
 
  Comparison of thermally and mechanically induced Si layer transfer in hydrogen-implanted Si wafers
 
 
Title: Comparison of thermally and mechanically induced Si layer transfer in hydrogen-implanted Si wafers
Author: Höchbauer, T.
Misra, A.
Nastasi, M.
Henttinen, K.
Suni, T.
Suni, I.
Lau, S.S.
Ensinger, W.
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 216 (2004) nr. C pages 7 p.
Year: 2004
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 13 of 70 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands