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Details for article 10 of 16 found articles
| Title: |
Influence of the target and working gas on the composition of silicon nitride thin films prepared by reactive RF-sputtering |
| Author: |
Vila, M. Prieto, C. Garcı́a-López, J. Respaldiza, M.A. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 211 (2003) nr. 2 pages 7 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 16 found articles
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