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Journal description
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Details for article 99 of 145 found articles
| Title: |
Plasma filament ion source for high current implanter |
| Author: |
Yabe, E. Ishizaka, N. Shibuya, T. Tonegawa, A. Takayama, K. Fukui, R. Takagi, K. Kikuchi, R. Okamoto, K. Komiya, S. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 21 (1987) nr. 1-4 pages 4 p. |
| Year: |
1987 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 99 of 145 found articles
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