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Journal description
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Details for article 6 of 64 found articles
| Title: |
Behavior of hydrogen implanted into Si-implanted SiO2 |
| Author: |
Ikeda, Mitsuharu Mitsusue, Ryuta Nakagawa, Masaharu Kondo, Satoshi Imai, Makoto Imanishi, Nobutsugu |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 209 (2003) nr. C pages 5 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 64 found articles
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