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Details for article 12 of 17 found articles
| Title: |
Mechanisms of void formation in Ge implanted SiO2 films |
| Author: |
Marstein, E.S. Gunnæs, A.E. Serincan, U. Jørgensen, S. Olsen, A. Turan, R. Finstad, T.G. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 207 (2003) nr. 4 pages 10 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 17 found articles
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