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Journal description
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Details for article 8 of 242 found articles
| Title: |
A new pixel sensor for uniformity control in ion implantation |
| Author: |
Marchal, J. Al-Ajili, A. Scott, J. Doak, D. Abdalla, M. Gwilliam, R. Fröjdh, Ch. O’Shea, V. Smith, K. Rahman, M. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 206 (2003) nr. C pages 5 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 242 found articles
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