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                                       Details for article 45 of 242 found articles
 
 
  Creation of internal point defect drains in silicon by carbon implantation
 
 
Title: Creation of internal point defect drains in silicon by carbon implantation
Author: Häberlen, M.
Lindner, J.K.N.
Stritzker, B.
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 206 (2003) nr. C pages 6 p.
Year: 2003
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 45 of 242 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands