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Influence of residual Ar+ in Ar cluster ion beam for DLC film formation |
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Titel: |
Influence of residual Ar+ in Ar cluster ion beam for DLC film formation |
Auteur: |
Kitagawa, Teruyuki Miyauchi, Kazuya Toyoda, Noriaki Kanda, Kazuhiro Ikeda, Tokumi Tsubakino, Harushige Matsuo, Jiro Matsui, Shinji Yamada, Isao |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 206 (2003) nr. C pagina's 5 p. |
Jaar: |
2003 |
Inhoud: |
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Uitgever: |
Elsevier Science B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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