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                                       Details for article 48 of 53 found articles
 
 
  Statistical 3D damage accumulation model for ion implant simulators
 
 
Title: Statistical 3D damage accumulation model for ion implant simulators
Author: Hernández-Mangas, J.M.
Lázaro, J.
Enriquez, L.
Bailón, L.
Barbolla, J.
Jaraı́z, M.
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 202 (2003) nr. C pages 5 p.
Year: 2003
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 48 of 53 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands