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X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires |
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Title: |
X-ray grazing incidence study of inhomogeneous strain relaxation in Si/SiGe wires |
Author: |
Hesse, A. Zhuang, Y. Holý, V. Stangl, J. Zerlauth, S. Schäffler, F. Bauer, G. Darowski, N. Pietsch, U. |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 200 (2003) nr. C pages 6 p. |
Year: |
2003 |
Contents: |
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Publisher: |
Elsevier Science B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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