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                                       Details for article 173 of 183 found articles
 
 
  The point defect engineering approaches for ultra-shallow boron junction formation in silicon
 
 
Title: The point defect engineering approaches for ultra-shallow boron junction formation in silicon
Author: Chu, W.-K.
Liu, J.R.
Lu, X.
Shao, L.
Wang, X.
Ling, P.
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 190 (2002) nr. 1-4 pages 6 p.
Year: 2002
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 173 of 183 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands