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Journal description
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Details for article 173 of 183 found articles
| Title: |
The point defect engineering approaches for ultra-shallow boron junction formation in silicon |
| Author: |
Chu, W.-K. Liu, J.R. Lu, X. Shao, L. Wang, X. Ling, P. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 190 (2002) nr. 1-4 pages 6 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 173 of 183 found articles
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