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                                       Details for article 159 of 183 found articles
 
 
  Sub-micron channeling contrast microscopy on reactive ion etched deep Si microstructures
 
 
Title: Sub-micron channeling contrast microscopy on reactive ion etched deep Si microstructures
Author: Teo, E.J.
Alkaisi, M
Bettiol, A.A.
Osipowicz, T.
Van Kan, J.
Watt, F.
Markwitz, A.
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 190 (2002) nr. 1-4 pages 6 p.
Year: 2002
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 159 of 183 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands