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                                       Details for article 106 of 183 found articles
 
 
  Medium energy ion-nanoprobe with TOF-RBS for semiconductor process analysis
 
 
Title: Medium energy ion-nanoprobe with TOF-RBS for semiconductor process analysis
Author: Iwasaki, K.
Tajima, J.
Takayama, H.
Pászti, F.
Takai, M.
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 190 (2002) nr. 1-4 pages 5 p.
Year: 2002
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 106 of 183 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands