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A computationally efficient simulator for three-dimensional Monte Carlo simulation of ion implantation into complex structures |
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Titel: |
A computationally efficient simulator for three-dimensional Monte Carlo simulation of ion implantation into complex structures |
Auteur: |
Li, Di Wang, Geng Chen, Yang Lin, Li Shrivastav, Gaurav Oak, Stimit Tasch, Al Banerjee, Sanjay Obradovic, Borna |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 184 (2001) nr. 4 pagina's 9 p. |
Jaar: |
2001 |
Inhoud: |
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Uitgever: |
Elsevier Science B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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