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Journal description
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Details for article 9 of 51 found articles
| Title: |
Cluster size effect on reactive sputtering by fluorine cluster impact using molecular dynamics simulation |
| Author: |
Aoki, T. Matsuo, J. Yamada, I. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 180 (2001) nr. 1-4 pages 7 p. |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 51 found articles
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