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Journal description
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Details for article 17 of 71 found articles
| Title: |
Formation of 2-D arrays of semiconductor nanocrystals or semiconductor-rich nanolayers by very low-energy Si or Ge ion implantation in silicon oxide films |
| Author: |
Normand, P Beltsios, K Kapetanakis, E Tsoukalas, D Travlos, T Stoemenos, J Van Den Berg, J Zhang, S Vieu, C Launois, H Gautier, J Jourdan, F Palun, L |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 178 (2001) nr. 1-4 pages 4 p. |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 71 found articles
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