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Journal description
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Details for article 18 of 21 found articles
| Title: |
The influence of target temperature and photon assistance on the radiation defect formation in low-fluence ion-implanted silicon |
| Author: |
Barabanenkov, M.Yu. Gyulai, J. Leonov, A.V. Mordkovich, V.N. Omelyanovskaya, N.M. Ryssel, H. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 174 (2001) nr. 3 pages 7 p. |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 18 of 21 found articles
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