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Journal description
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Details for article 14 of 20 found articles
| Title: |
Polyenergy ion beam synthesis of buried oxynitride layer in silicon |
| Author: |
Barabanenkov, M.Yu. Agafonov, Yu.A. Mordkovich, V.N. Pustovit, A.N. Vyatkin, A.F. Zinenko, V.I. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 171 (2000) nr. 3 pages 8 p. |
| Year: |
2000 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 14 of 20 found articles
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