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Journal description
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Details for article 18 of 30 found articles
| Title: |
Method and experimental arrangement for Al thin film deposition from r.f. metal plasma with simultaneous self-ion bombardment |
| Author: |
Mohnjuk, A.A Gusev, I.V Belevsky, V.P |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 170 (2000) nr. 3-4 pages 10 p. |
| Year: |
2000 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 18 of 30 found articles
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