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Journal description
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Details for article 4 of 31 found articles
| Title: |
Compositional and morphological study of reactive ion beam deposited AlN thin films |
| Author: |
Cheng, L.L Yu, Y.H Sundaravel, B Luo, E.Z Lin, S Lei, Y.M Ren, C.X Cheung, W.Y Wong, S.P Xu, J.B Wilson, I.H |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 169 (2000) nr. 1-4 pages 4 p. |
| Year: |
2000 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 31 found articles
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