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Journal description
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Details for article 60 of 121 found articles
| Title: |
Micromachining of silicon with a proton microbeam |
| Author: |
Polesello, P Manfredotti, C Fizzotti, F Lu, R Vittone, E Lerondel, G Rossi, A.M Amato, G Boarino, L Galassini, S Jaksic, M Pastuovic, Z |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 158 (1999) nr. 1-4 pages 173-178 |
| Year: |
1999 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 60 of 121 found articles
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