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                                       Details for article 6 of 121 found articles
 
 
  Aluminium and silicon determination on two Si–Al sputter targets used for magnetron sputtering
 
 
Title: Aluminium and silicon determination on two Si–Al sputter targets used for magnetron sputtering
Author: Terwagne, G
Bodart, F
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 158 (1999) nr. 1-4 pages 683-688
Year: 1999
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 6 of 121 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands