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Journal description
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Details for article 148 of 175 found articles
| Title: |
SIMS analysis of thermal and ion-beam induced broadening of thin metal markers in silicon |
| Author: |
Tonn, D.G. Sankey, O.F. Tsong, I.S.T. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 15 (1986) nr. 1-6 pages 5 p. |
| Year: |
1986 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 148 of 175 found articles
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