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Formation of complex Al–N–C layer in aluminium by successive carbon and nitrogen implantation |
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Titel: |
Formation of complex Al–N–C layer in aluminium by successive carbon and nitrogen implantation |
Auteur: |
Uglov, V.V. Cherenda, N.N. Khodasevich, V.V. Sokol, V.A. Abramov, I.I. Danilyuk, A.L. Wenzel, A. Gerlach, J. Rauschenbach, B. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 147 (1999) nr. 1-4 pagina's 5 p. |
Jaar: |
1999 |
Inhoud: |
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Uitgever: |
Elsevier Science B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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