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12C(α,α)12C resonant elastic scattering at 5.7 MeV as a tool for carbon quantification in silicon-based heterostructures |
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Titel: |
12C(α,α)12C resonant elastic scattering at 5.7 MeV as a tool for carbon quantification in silicon-based heterostructures |
Auteur: |
Berti, M. Salvador, D.De Drigo, A.V. Romanato, F. Sambo, A. Zerlauth, S. Stangl, J. Schäffler, F. Bauer, G. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 143 (1998) nr. 3 pagina's 14 p. |
Jaar: |
1998 |
Inhoud: |
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Uitgever: |
Elsevier Science B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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