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                                       Details for article 24 of 128 found articles
 
 
  Depth profile of chemical species in multiple doped trimethylsilane film on Si (100) surfaces by low energy Ar ions
 
 
Title: Depth profile of chemical species in multiple doped trimethylsilane film on Si (100) surfaces by low energy Ar ions
Author: Wang, Paul W
Bater, S
Appeared in: Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms
Paging: Volume 141 (1998) nr. 1-4 pages 6 p.
Year: 1998
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 24 of 128 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands