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Ir and Rh silicide formation investigated by microprobe RBS |
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Title: |
Ir and Rh silicide formation investigated by microprobe RBS |
Author: |
Park, Y.K. Pászti, F. Takai, M. Temmel, G. Buerte, E.P. Ryssel, H. Wiget, R. Kinomura, A. Horino, Y. Fujii, K. |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 130 (1997) nr. 1-4 pages 6 p. |
Year: |
1997 |
Contents: |
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Publisher: |
Published by Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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