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Journal description
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Details for article 48 of 132 found articles
| Title: |
Etching of silicon by SF6 induced by ion bombardment |
| Author: |
Oostra, D.J. Haring, A. De Vries, A.E. Sanders, F.H.M. Van Veen, G.N.A. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 13 (1986) nr. 1-3 pages 5 p. |
| Year: |
1986 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 48 of 132 found articles
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