|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 131 of 132 found articles
| Title: |
Trace surface analysis: 30 ppb analysis with removal of less than a monolayer. Fe and Ti impurities in the first atomic layer of Si wafers |
| Author: |
Pellin, M.J. Young, C.E. Calaway, W.F. Gruen, D.M. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 13 (1986) nr. 1-3 pages 5 p. |
| Year: |
1986 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 131 of 132 found articles
| << previous | next >> |