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Journal description
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Details for article 10 of 117 found articles
| Title: |
Characterization and removal of residual defects in high dose, very low energy BF2 +-implanted (001) Si |
| Author: |
Yang, J.J. Chen, L.J. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 121 (1997) nr. 1-4 pages 4 p. |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 117 found articles
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