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Journal description
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Details for article 23 of 68 found articles
| Title: |
High temperature high dose C ion implantation in epitaxial SiGe |
| Author: |
Pérez-Rodríguez, A. Romano-Rodríguez, A. Serre, C. Calvo-Barrio, L. Cabezas, R. González-Varona, O. Morante, J.R. Kögler, R. Skorupa, W. Rodríguez, A. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 120 (1996) nr. 1-4 pages 4 p. |
| Year: |
1996 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 23 of 68 found articles
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