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Journal description
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Details for article 9 of 75 found articles
| Title: |
Beam scanning system for the uniformity of implanted doses in a large area |
| Author: |
Desgardin, P. Ntsoenzok, E. Barbot, J.F. Briaud, J. Vernois, J. Isabelle, D.B. |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 112 (1996) nr. 1-4 pages 3 p. |
| Year: |
1996 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 75 found articles
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