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Optimization of buried implanted layer in dynamic random access memories by soft error mapping and ion beam-induced current |
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Titel: |
Optimization of buried implanted layer in dynamic random access memories by soft error mapping and ion beam-induced current |
Auteur: |
Kishimoto, T. Sayama, H. Takai, M. Ohno, Y. Sonoda, K. Nishimura, T. Kinomura, A. Horino, Y. Fujii, K. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 104 (1995) nr. 1-4 pagina's 4 p. |
Jaar: |
1995 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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