|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 58 of 97 found articles
| Title: |
Micromachined self-actuated piezoresistive cantilever for high speed SPM |
| Author: |
Michels, Thomas Guliyev, Elshad Klukowski, Michal W. Rangelow, Ivo |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 97 (2012) nr. C pages 4 p. |
| Year: |
2012 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 58 of 97 found articles
| << previous | next >> |