|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 26 of 47 found articles
| Title: |
Interface engineering for the TaN/Ta barrier film deposition process to control Ta-crystal growth |
| Author: |
Gerlich, Lukas Ohsiek, Susanne Klein, Christoph Geiß, Mario Friedemann, Michael Kücher, Peter Schmeißer, Dieter |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 106 (2013) nr. C pages 6 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 26 of 47 found articles
| << previous | next >> |