Electrical characterization of CNT contacts with Cu Damascene top contact
Titel:
Electrical characterization of CNT contacts with Cu Damascene top contact
Auteur:
van der Veen, Marleen H. Vereecke, Bart Huyghebaert, Cedric Cott, Daire J. Sugiura, Masahito Kashiwagi, Yusaku Teugels, Lieve Caluwaerts, Rudy Chiodarelli, Nicolò Vereecken, Philippe M. Beyer, Gerald P. Heyns, Marc M. De Gendt, Stefan Tökei, Zsolt