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Journal description
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Details for article 95 of 138 found articles
| Title: |
New materials of spin-on organic hardmask for sub-70nm devices |
| Author: |
Choi, Sang-Jun Oh, Chang-Il Uh, Dong-Seon |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 84 (2007) nr. 12 pages 5 p. |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 95 of 138 found articles
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