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Journal description
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Details for article 64 of 138 found articles
| Title: |
Formation of aluminum tunnel pits arrayed using SU-8 masks with UV-assisted thermal imprint lithography |
| Author: |
Jang, Joo-Hee Choi, Woo-Sung Kim, Nam-Jeong Lee, Chang-Hyoung Kim, Taek-You Park, Chan Suh, Su-Jeong |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 87 (2010) nr. 12 pages 4 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 64 of 138 found articles
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