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Journal description
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Details for article 62 of 138 found articles
| Title: |
Fast backscattering parameter determination in e-beam lithography with a modified doughnut test |
| Author: |
Keil, Katja Hauptmann, Marc Choi, Kang-Hoon Kretz, Johannes Eng, Lukas M. Bartha, Johann W. |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 86 (2009) nr. 12 pages 4 p. |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 62 of 138 found articles
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