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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
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Details for article 60 of 187 found articles
| Title: |
Electrochemical behavior of copper and cobalt in post-etch cleaning solutions |
| Author: |
Bilouk, S. Broussous, L. Nogueira, R.P. Ivanova, V. Pernel, C. |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 86 (2009) nr. 10 pages 7 p. |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 60 of 187 found articles
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