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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
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Details for article 131 of 187 found articles
| Title: |
Oxygen chemiluminescence in He plasma as a method for plasma damage evaluation |
| Author: |
Urbanowicz, A.M. Shamiryan, D. Baklanov, M.R. De Gendt, S. |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 85 (2008) nr. 10 pages 5 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 131 of 187 found articles
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