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Journal description
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Details for article 87 of 135 found articles
| Title: |
Plasma deposition of Si-N and Si-O passivation layers on three-dimensional sensor devices |
| Author: |
Schmid, P. Orfert, M. Vogt, M. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 98 (1998) nr. 1-3 pages 8 p. |
| Year: |
1998 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 87 of 135 found articles
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