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Journal description
All volumes of the corresponding journal
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Details for article 86 of 118 found articles
| Title: |
Scalable large volume ECR plasma generation for low pressure applications |
| Author: |
Scholze, F. Neumann, H. Zeuner, M. Bigl, F. Mai, J. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 97 (1997) nr. 1-3 pages 4 p. |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Elsevier Science S.A. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 86 of 118 found articles
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