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                                       Details for article 21 of 118 found articles
 
 
  Energy-resolved mass spectrometry and Monte Carlo simulation of atomic transport in magnetron sputtering
 
 
Title: Energy-resolved mass spectrometry and Monte Carlo simulation of atomic transport in magnetron sputtering
Author: Kadlec, S.
Quaeyhaegens, C.
Knuyt, G.
Stals, L.M.
Appeared in: Surface & coatings technology
Paging: Volume 97 (1997) nr. 1-3 pages 9 p.
Year: 1997
Contents:
Publisher: Elsevier Science S.A.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 21 of 118 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands